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1. Features
1) 3D measuring machine equipped with both the highest speed and precision.
2) Bridge fixed moving table structure
3) Separation of X-axis drive and Y-axis drive
4) Increase the accuracy correction temperature to about 10 times the existing
5) Vibration suppression technology (internal vibration measures)
2. Models and Specifiacations
Model
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LEGEX322
LEGEX574
LEGEX774
LEGEX776
LEGEX9106
LEGEX12128
MeasuringRange
X-axis
300mm
510mm
710mm
910mm
1210mm
Y-axis
200mm
1010mm
Z-axis
460mm
610mm
810mm
Max. Speed
200mm/s
Resolution
0.0001mm
Meas. Type
Ultra Precision Linear Encoder
Accuracy MPEe(§)
0.8+2L/1000
0.35+L/1000
0.6+1.5L/1000
Max. Acceleration
850m§¾
1000m§¾