◈ Specification

1.    Measuring stage

1) Size : Ø160mm

Ø160mm

2) Tilting range X :

±2° (X-Y Manual)

3) Capacity

2kg

2.    Pick up

1)Measuring force

1~50mgf

2)Range

600um

3)Sensor method

LVDT(direct motion)

4)Stylus

R2um (other size(option)

3.    X-Axis

1)Range

100mm

2)Straightness

0.2um/100mm

3)Speed

0.005~20mm/sec

4)Repeatability

±5um

Y-Axis

1)Range

25mm

2)moving method

Mnual

4.    Z-Axis

1)Moving range

54mm

2)Auto stop function

Yes

5.    Table rotation

1)Rotating angle

360°

6.    Magnification

1)Vertical(X)

50~2,000,000X

2)Hrizontal(Z)

1~10,000X

7.    Monitering system

1)Camera

1/3.2 camera

2)Magnification

Approx. 390X

8.    Analysis item

Microfigure step, Roughness, Waveness, Pitch

9.    Asisit function

Recalculation unit change(um, Å), Auto measurement

Display Mag. Fixed function, Auto step analysis

Real time profile display, Two or more step measurement

10.  Repeatability

1σ 0.5nm

11.  Power source

AC 100~220V 200VA

◈ Consist of :

1) Main body(ET-200A)

2) X-Y Stage(100x25mm)

3) Pick up, PU-EA2UW

4) Stylus, ET1479(2um)

5) Observation equipment, PSM-7

5) Video capature, ETM-4

6) Remote controller, RC-83

7) Step height specimen, SS-T31

8) Personal computer w/Monitor

A.    Recommend acc,s

1) Spare stylus,ET-1479(2um)

2) Vibration absorbing table