Item

Specification

Measurement Method

Contact 4-point probe

Measurement Range (1)

1mΩ /sq ~ 10MΩ /sq (Low)

Resolution

1μ Ω /sq

Spacing

(Needle to needle)

1mm

(available 0.50, 0.635, 1.00mm, 1.27mm, 1.59mm spacing)

Tolerance

±10um

Cylindrical

4 Point Probe head (2)

Needles

Tungsten carbide

Radii

300 μm

(available12.5, 25, 40, 150, 200, 300, 500 μm)

Depend on material

Loads

100g

(available Low:10~30g, Medium:30~60, High:60~150g)

Accuracy(Repeatability)

±1.0% (1mΩ /sq ~ 10MΩ /sq )